Aceinna · Flow sensors
MFC2030 MEMS gas flow sensor
Bi-directional thermal MEMS gas flow module, +/-30 SLM, with I2C output and low power draw.
- +/-30 SLM, bi-dir
- 3% m.v. accuracy
- I2C output
- 2.7 to 5.5 V supply
Overview
The MFC2030 is a thermal mass flow sensing module in the MFC2000 series, with a MEMS sensing element integrated with CMOS signal processing and embedded firmware that converts gas flow to a digital output. It measures bi-directional flow up to +/-30 SLM with low pressure drop and low operating power, and its firmware is configurable for output type, calibration, measurement mode and power. A PC-based GUI is available, and evaluation kits with a USB PC interface, software and cable are offered.
Built for
- Medical gas flow measurement and control
- Industrial flow and mass flow controllers
- Natural gas metering and detection
- Consumer products
Key features
Thermal MEMS sensing
A micro-heater between two thermopiles measures flow with no moving parts.
Bi-directional flow
Measures flow in both directions across the full range.
Configurable firmware
Output type, calibration, measurement mode and power settings can be tailored.
Low power
5 mA operating and 100 µA sleep, with a programmable power-cycle mode.
Flexible fittings
Push-in tube fittings or a PPSU flange for manifold mounting.
Temperature compensated
Calibrated over temperature, with custom versions available.
Specifications
- Measurement range
- +/-30 SLM
- Accuracy
- 3.0% m.v. (0.01 Qmax to Qmax)
- Repeatability
- 0.8% m.v. at 100 Hz ODR
- Total error band
- 3.5% m.v. (0 to 50 C)
- Pressure drop at Qmax
- 4 mbar
- Supply voltage
- 2.7 to 5.5 VDC (3.3 V typ)
- Supply current
- 5 mA operating, 100 µA sleep
- Output
- I2C, default address 0x31
- Sample rate
- 10 ms
- Working pressure
- 0 to 8 bar
- Operating temperature
- -20 to 80 C
- Calibrated temperature
- 0 to 50 C
- Housing
- PPSU
- Weight
- < 100 g
MFC2000 series ordering options
| Option | Code | Meaning |
|---|---|---|
| Range | 2030 | 30 SLM |
| Range | 2070 | 70 SLM |
| Calibration | B | Bi-directional |
| Calibration | U | Uni-directional |
| Housing | P | PPSU |
| Tube OD | 1 | 6 mm |
| Gas | N | Air / N2 |
| Gas | X | O2 |
| Gas | C | CO2 |
| Gas | R | Ar |
| Gas | M | CH4 |
Models and options
- MFC2030 (+/-30 SLM)
- MFC2070 (+/-70 SLM, MFC2000 series datasheet only)
Specifications as published by Aceinna. Configurations vary by model; we will confirm the exact build with your quote.
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